Particle contamination control = Defectivity
Particle on wafer front side kills one die, die is fully processed providing no value for the customer.
What does defectivity mean in an ASML machine by ASML
As dr. of Chemistry and materials science Richard takes us into the world of defectivity, what is it and how important is it for an ASML machine.
Richard Bruls - Principal Architect at ASML
- Importance of defectivity and contamination control within semiconductor industry.
- Defectivity within ASML.
- Critical defect size.
- Contamination control approach (product lifecycle and defectivity chain).
- Clean parts strategy.
- Surface cleanliness – particles measurement.
- Examples how manufacturing and machining processes contribute to defectivity.
- Summary and conclusions.
