Removal processes
Comply with GSA surface cleanliness requirements: how to reach ASML grade 1 / grade 2 requirements after wire EDM by Ter Hoek Vonkerosie Wire EDM
Gate Oxide Integrity (GOI) is crucial, as its degradation can disrupt transistor function. ASML systems require strict measures to prevent GOI-degrading contaminants from reaching the wafer. Grade 2 standards ensure parts and modules are free of Cu, Ag, and Au, essential for preventing cross-contamination.
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